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Selectable phase formation in VAlN thin films by controlling Al+ subplantation depth
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. Rhein Westfal TH Aachen, Germany.ORCID iD: 0000-0002-4898-5115
Rhein Westfal TH Aachen, Germany.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-2837-3656
Rhein Westfal TH Aachen, Germany.
2017 (English)In: Scientific Reports, ISSN 2045-2322, E-ISSN 2045-2322, Vol. 7, article id 17544Article in journal (Refereed) Published
Abstract [en]

We report on a thin film synthesis technique which allows for unprecedented control over the crystalline phase formation in metastable transition metal nitride based layers. For the model material system of V0.26Al0.74N, a complete transition from hexagonal to supersaturated cubic structure is achieved by tuning the incident energy, hence subplantation depth, of Al+ metal ions during reactive hybrid high power impulse magnetron sputtering of Al target and direct current magnetron sputtering of V target in Ar/N-2 gas mixture. These findings enable the phase selective synthesis of novel metastable materials that combine excellent mechanical properties, thermal stability, and oxidation resistance.

Place, publisher, year, edition, pages
NATURE PUBLISHING GROUP , 2017. Vol. 7, article id 17544
National Category
Materials Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-143901DOI: 10.1038/s41598-017-17846-5ISI: 000417796000064PubMedID: 29235523OAI: oai:DiVA.org:liu-143901DiVA, id: diva2:1170060
Note

Funding Agencies|German Research Foundation (DFG) [SFB-TR 87]; VINN Excellence Center Functional Nanoscale Materials (FunMat-2) Grant [2016-05156]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkping University [SFO-Mat-LiU 2009-00971]; Knut and Alice Wallenberg Foundation [2011.0143]; Aforsk Foundation [16-359]

Available from: 2018-01-02 Created: 2018-01-02 Last updated: 2018-01-31

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