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Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. European Spallat Source ERIC, Sweden.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
Philipps University of Marburg, Germany.
Philipps University of Marburg, Germany.
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2017 (English)In: The Journal of Physical Chemistry C, ISSN 1932-7447, E-ISSN 1932-7455, Vol. 121, no 47, p. 26465-26471Article in journal (Refereed) Published
Abstract [en]

Alkylboranes, such as trimethylboron (TMB) and triethylboron (TEB), are promising alternative precursors in low temperature chemical vapor deposition (CVD) of boron-containing thin films. In this study, CVD growth of B-C films using TMB and quantum-chemical calculations to elucidate a gas phase chemical mechanism were undertaken. Dense, amorphous, boron-rich (B/C 1.5-3) films were deposited at 1000 degrees C in both dihydrogen and argon ambients, while films with crystalline B4C and B25C inclusions were deposited at 1100 degrees C in dihydrogen. A script-based automatization scheme was implemented for the quantum-chemical computations to enable time efficient screening of thousands of possible gas phase CVD reactions. The quantum-chemical calculations suggest TMB is mainly decomposed by an unimolecular alpha-H elimination of methane, which is complemented by dihydrogen-assisted elimination of methane in dihydrogen.

Place, publisher, year, edition, pages
AMER CHEMICAL SOC , 2017. Vol. 121, no 47, p. 26465-26471
National Category
Materials Chemistry
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URN: urn:nbn:se:liu:diva-143937DOI: 10.1021/acs.jpcc.7b09538ISI: 000417228500037OAI: oai:DiVA.org:liu-143937DiVA, id: diva2:1169777
Note

Funding Agencies|European Spallation Source ERIC; Knut and Alice Wallenberg Foundation; German Science Foundation [GRK 1782]; Swedish Foundation for Strategic Research (SSF) [IS14-0027]; COST Action [MP1402]; COST (European Cooperation in Science and Technology); Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO-Mat-LiU) [2009-00971]

Available from: 2017-12-29 Created: 2017-12-29 Last updated: 2018-02-12

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Imam, MewludeSouqui, LaurentHöglund, CarinaSchmidt, SusannHögberg, HansBirch, JensPedersen, Henrik
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