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Fabrication and characterization of nano/micrometer glass channels with UV lithography
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. Uppsala University, Disciplinary Domain of Science and Technology, Biology, Department of Cell and Molecular Biology. Uppsala University, Disciplinary Domain of Science and Technology, Biology, Biology Education Centre. Elf Lab. (EMBLA)
2017 (English)Independent thesis Advanced level (degree of Master (One Year)), 30 credits / 45 HE creditsStudent thesis
Abstract [en]

In this project, fabrication and characterization of nano/microfluidic channels on borosilicate glass substrate were carried out using a Photo/Ultraviolet (UV) lithography method, which has applications in single-cell analysis. In our single-cell analysis glass system, the bacterial cells will be made to sit in the micrometer channels and also the sub-micron size channels around 300 nm is aspired so it helps in passing the fluid to the outlet hole while holding the cells back. This system will help in the microscopic analysis of the bacterial cell growth over generations. A multi-layer mask approach is used to pattern the etch masks on a glass for the consecutive Isotropic wet etching of the glass substrate. Isotropic wet etching is utilized to transfer the patterned structures from a metal mask to the glass and also to under etch the differently sized spacing pitches (area separating nano/microfluidic channels in our design) to obtain sub-micron channel dimensions. Many test structures were designed on the photomask to optimize during the fabrication process with combinations of differently sized channels with differently sized spacing pitches ranging from 300 nm to 300 µm dimensions. In order to obtain this sub-micron sized channels on glass using a UV lithography technique is a challenging task, so the initial aim was to use the designed spacing pitches present between the channels as a platform to isotopically etch and create an under etched space width size in sub-micrometer. But we were able to obtain channel structure in sub-micron scale directly by optimizing multiple steps of the fabrication process. Characterization of the nano/microfluidic channels was done with the help of Optical microscopy and Dektak profilometer to measure the width, depth and uniformity of the structures during the optimization of the lithography process and scanning electron microscope (SEM) images were taken to analyze the channel dimensions and to get images of the fabricated channels.  

Place, publisher, year, edition, pages
2017. , p. 37
Series
Abstracts of Uppsala dissertations from the Faculty of Science, ISSN 0345-0058Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1104-2516
Keywords [en]
Microtechnology, Biotechnology, Nanotechnology
National Category
Materials Engineering Nano Technology
Identifiers
URN: urn:nbn:se:uu:diva-336959OAI: oai:DiVA.org:uu-336959DiVA, id: diva2:1167785
Educational program
Master Programme in Molecular Biotechnology
Presentation
2017-06-30, Biomedical center, Uppsala, 12:36 (English)
Supervisors
Examiners
Available from: 2017-12-19 Created: 2017-12-19 Last updated: 2017-12-19Bibliographically approved

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