Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
An Electron Beam Heated Evaporation Source
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. Department of Physics, Uppsala University, Box 530, S-75121 Uppsala, Sweden.ORCID iD: 0000-0002-0317-0190
1994 (English)Report (Other academic)
Abstract [en]

An electron beam evaporator has been assembled, tested and used for deposition of thin nickel films. Flux and deposition rates has been measured with an oscillating quartz crystal monitor (QCM), an ion sensor wire, and visible deposition on a mirror on front of the evaporator. A thin nickel rod of 2 mm diameter was found to improve the pressure in comparison to a 6-mm nickel rod. The flux was typically 3-4 Angstroms per minute during the test, but other flux rates can easily be achieved by changing the filament current and the acceleration voltage.

Place, publisher, year, edition, pages
Uppsala: Uppsala universitet , 1994. , 4 p.
National Category
Natural Sciences Condensed Matter Physics Metallurgy and Metallic Materials
Identifiers
URN: urn:nbn:se:liu:diva-137490OAI: oai:DiVA.org:liu-137490DiVA: diva2:1096407
Available from: 2017-05-17 Created: 2017-05-17 Last updated: 2017-06-02Bibliographically approved

Open Access in DiVA

An Electron Beam Heated Evaporation Source(1205 kB)17 downloads
File information
File name FULLTEXT01.pdfFile size 1205 kBChecksum SHA-512
140ae22c6c01ecbe8db832034fd9143a5a535830b020bbce0f8e1da6adb4bf288b323499337322b8ec6fb6682a6462180b34796f960f4d9e0719b85f29f71faf
Type fulltextMimetype application/pdf

Search in DiVA

By author/editor
Magnuson, Martin
By organisation
Thin Film PhysicsFaculty of Science & Engineering
Natural SciencesCondensed Matter PhysicsMetallurgy and Metallic Materials

Search outside of DiVA

GoogleGoogle Scholar
Total: 17 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Total: 133 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf