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Design optimization and characterization of nanogap crack-junctions
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-6731-3886
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-0525-8647
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9552-4234
2017 (English)Conference paper, Published paper (Refereed)
Abstract [en]

A crack-junction (CJ) is a nanogap electrode pair featuring reliable and controlled nanoscale gap widths that can be produced in large numbers with high dimensional accuracy on a substrate. In this paper, we present a discussion on geometrical considerations of CJs made of titanium nitride (TiN) electrodes, which provides guidelines for reliable formation of TiN CJs with well-defined dimensions. We further provide complete electrical characterization of 40 TiN CJs designed as electron tunneling junctions.

Place, publisher, year, edition, pages
IEEE, 2017. p. 644-647
Keywords [en]
arrays, crack-junctions, tunnel junctions, electronic transport, nanogaps
National Category
Nano Technology
Identifiers
URN: urn:nbn:se:kth:diva-206147DOI: 10.1109/MEMSYS.2017.7863490ISI: 000402552000167Scopus ID: 2-s2.0-85015799426ISBN: 978-1-5090-5078-9 (electronic)OAI: oai:DiVA.org:kth-206147DiVA, id: diva2:1091744
Conference
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, USA, 22-26 January 2017
Note

QC 20170502

Available from: 2017-04-27 Created: 2017-04-27 Last updated: 2018-04-05Bibliographically approved

Open Access in DiVA

fulltext(954 kB)9 downloads
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Publisher's full textScopushttp://ieeexplore.ieee.org/document/7863490/

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Dubois, ValentinNiklaus, FrankStemme, Göran
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CiteExportLink to record
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