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MEMS tunable silicon photonic grating coupler for post-assembly optimization of fiber-to-chip coupling
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-7249-7392
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
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2017 (English)In: Micro Electro Mechanical Systems (MEMS), 2017 30th IEEE International Conference on / [ed] Institute of Electrical and Electronics Engineers (IEEE), Institute of Electrical and Electronics Engineers (IEEE), 2017, p. 293-296Conference paper, Published paper (Refereed)
Abstract [en]

We experimentally demonstrate the first MEMS tunable photonic fiber-to-waveguide grating coupler, and apply it to electrostatically optimize the light coupling between an optical fiber and an on-chip silicon photonic waveguide. Efficient and stable fiber-to-chip coupling is vital for combining the high optical quality of silica fibers with the integration density of silicon photonics. Our device has the potential to lower assembly cost and extend device lifetime, by enabling electrical post-assembly adjustments.

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE), 2017. p. 293-296
Keyword [en]
MEMS, Silicon photonics, photonics, silicon, grating coupler, waveguide, infrared, telecommunications, optical communications, silicon
National Category
Nano Technology
Research subject
Electrical Engineering; Telecommunication; Materials Science and Engineering; Physics
Identifiers
URN: urn:nbn:se:kth:diva-201140ISI: 000402552000076Scopus ID: 2-s2.0-85015784795OAI: oai:DiVA.org:kth-201140DiVA, id: diva2:1072628
Conference
Micro Electro Mechanical Systems (MEMS), 2017 30th IEEE International Conference on
Projects
VR-HETCellRing
Funder
Swedish Research Council, 621-2012-5364Swedish Research Council, B0460801
Note

QC 20170301

Available from: 2017-02-08 Created: 2017-02-08 Last updated: 2017-11-29

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Errando-Herranz, CarlosColangelo, MarcoAhmed, SamyBjörk, JoelGylfason, Kristinn B.
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CiteExportLink to record
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Citation style
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