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MEMS tunable silicon photonic grating coupler for post-assembly optimization of fiber-to-chip coupling
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-7249-7392
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
Show others and affiliations
2017 (English)In: Micro Electro Mechanical Systems (MEMS), 2017 30th IEEE International Conference on / [ed] Institute of Electrical and Electronics Engineers (IEEE), Institute of Electrical and Electronics Engineers (IEEE), 2017, p. 293-296Conference paper, Published paper (Refereed)
Abstract [en]

We experimentally demonstrate the first MEMS tunable photonic fiber-to-waveguide grating coupler, and apply it to electrostatically optimize the light coupling between an optical fiber and an on-chip silicon photonic waveguide. Efficient and stable fiber-to-chip coupling is vital for combining the high optical quality of silica fibers with the integration density of silicon photonics. Our device has the potential to lower assembly cost and extend device lifetime, by enabling electrical post-assembly adjustments.

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE), 2017. p. 293-296
Keywords [en]
MEMS, Silicon photonics, photonics, silicon, grating coupler, waveguide, infrared, telecommunications, optical communications, silicon
National Category
Nano Technology
Research subject
Electrical Engineering; Telecommunication; Materials Science and Engineering; Physics
Identifiers
URN: urn:nbn:se:kth:diva-201140ISI: 000402552000076Scopus ID: 2-s2.0-85015784795OAI: oai:DiVA.org:kth-201140DiVA, id: diva2:1072628
Conference
Micro Electro Mechanical Systems (MEMS), 2017 30th IEEE International Conference on
Projects
VR-HETCellRing
Funder
Swedish Research Council, 621-2012-5364Swedish Research Council, B0460801
Note

QC 20170301

Available from: 2017-02-08 Created: 2017-02-08 Last updated: 2018-09-14
In thesis
1. Photonic MEMS for optical information technologies
Open this publication in new window or tab >>Photonic MEMS for optical information technologies
2018 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Photonic integrated circuits (PICs) combine hundreds of optical components on a chip, and can enable fast communications, high-performance computing, and improved sensing. PICs, made by miniaturized optical waveguides, require many reconfigurable elements to enable programmable functionalities and to compensate for fabrication variations and environmental factors. However, current reconfiguration methods consume large amounts of electrical power, which is a bottleneck for their scalability, and limits their applications. A promising technology to alleviate this bottleneck is photonic microelectromechanical systems (MEMS), which provides low-power reconfiguration of PICs using electromechanical actuation. This thesis reports on several photonic MEMS devices and technologies that enable low-power reconfiguration for PICs, and bring new functionalities towards efficient nonlinear optics, optical beam steering, and photonic Lab-on-chips (LoCs). A fundamental element of reconfigurable PICs is the phase shifter, and this thesis introduces novel photonic MEMS phase shifters with low power consumption, low optical losses, and linear actuation, and applies them to reconfigurable filtering. Moreover, photonic MEMS bring novel functionalities arising from the mechanical movement of waveguide components, and, in this thesis, a method to tune waveguide dispersion for efficient nonlinear optics in silicon, and two types of reconfigurable waveguide gratings for low-power optical beam steering are developed. The photonic MEMS platform introduced in this thesis can be combined with polarization diversity schemes by using a novel suspended polarization beam splitter. In addition, other technologies addressing challenges in integrated photonics are introduced, such as a lithium niobate on insulator (LNOI) platform that combines grating couplers, high confinement waveguides, and Bragg gratings, for electro-optic modulation and efficient nonlinear optics; and a cost-efficient method to integrate photonic sensors into LoCs for healthcare applications. The technologies introduced in this thesis have potential to enable large-scale, power-efficient, and highly functional PICs, with prospects for more efficient and more functional optical information technologies.

Place, publisher, year, edition, pages
KTH Royal Institute of Technology, 2018. p. iii-xi, 79
Series
TRITA-EECS-AVL ; 2018:55
Keywords
Micro-electro-mechanical systems (MEMS), photonics, silicon photonics, photonic integrated circuits (PIC), lithium niobate photonics, ring resonator, polarization beam splitter (PBS), microfluidic integration, lab-on-chip (LoC), optical beam steering, nonlinear optics
National Category
Nano Technology Other Physics Topics
Research subject
Electrical Engineering; Physics; Materials Science and Engineering
Identifiers
urn:nbn:se:kth:diva-235069 (URN)978-91-7729-910-3 (ISBN)
Public defence
2018-10-12, M2, Brinellvägen 64, Stockholm, 10:00 (English)
Opponent
Supervisors
Projects
VR-HETMORPHIC
Funder
Swedish Research Council, 621-2012-5364EU, Horizon 2020, 780283
Note

QC 20180917

Available from: 2018-09-17 Created: 2018-09-14 Last updated: 2018-09-17Bibliographically approved

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