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NanoRIM: Sub-micron Structuring with Reaction Injection Molding
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (Micro and Nanosystems (MST), KTH)ORCID iD: 0000-0003-4322-6192
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-8248-6670
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-0441-6893
2017 (English)In: 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers (IEEE), 2017Conference paper, Published paper (Refereed)
Abstract [en]

  We report “nanoRIM”, the first reaction injection molding (RIM) replication method for thermosets with demonstrated feature sizes down to 250 nm. NanoRIM constitutes the first scalable manufacturing method for thermoset polymers that allows combining large (> cm) and small (< μm) lateral feature sizes with varying replica thickness in the same device. We demonstrate nanoRIM for manufacturing replica in off-stoichiometry thiol-ene (OSTE) thermoset.

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE), 2017.
Keyword [en]
sub-micron, polymer, reaction injection molding
National Category
Nano Technology
Identifiers
URN: urn:nbn:se:kth:diva-199954ISI: 000402552000055Scopus ID: 2-s2.0-85015800320OAI: oai:DiVA.org:kth-199954DiVA, id: diva2:1067121
Conference
30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, January 22-26, 2017
Note

QC 20170123

Available from: 2017-01-20 Created: 2017-01-20 Last updated: 2017-07-03Bibliographically approved

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fulltext(11255 kB)68 downloads
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Scopushttp://www.mems17.org/

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Zandi Shafagh, Rezavan der Wijngaart, WouterHaraldsson, Tommy
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