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High aspect ratio silicon field emitter arrays (FEAs) as miniaturized stable electron source for catheter-based radiotherapy
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-3325-8273
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9552-4234
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
2017 (English)In: Proceedings of IEEE 30th International Conference on Micro Electro Mechanical Systems, IEEE conference proceedings, 2017Conference paper, Published paper (Refereed)
Abstract [en]

This paper presents a miniaturized electron source based on high aspect ratio silicon (Si) field emitter arrays (FEAs) intended for generating x-rays in a catheter-based radiotherapy application. The fabricated Si FEAs demonstrate stable emission currents of approximately 10 μA at an acceleration voltage of 21.7 kV for more than 15 minutes under moderate vacuum requirements. The current stability was enhanced by the introduction of a field compensation frame design for the electric field distribution and a tip conditioning procedure of the Si FEAs. The experimental results are in line with the requirement of delivering relevant doses for cancer radiotherapy. 

Place, publisher, year, edition, pages
IEEE conference proceedings, 2017.
Keywords [en]
silicon, field emission, field emitter arrays (FEAs), miniaturized, electron source, x-ray, radiotherapy, brachytherapy, catheter-based, minimally invasive
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electrical Engineering
Identifiers
URN: urn:nbn:se:kth:diva-199869ISI: 000402552000135Scopus ID: 2-s2.0-85015783123OAI: oai:DiVA.org:kth-199869DiVA, id: diva2:1066283
Conference
IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
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Note

When citing this work, please cite the original published paper.

QCR 20170206

QC 20170607

Available from: 2017-01-17 Created: 2017-01-16 Last updated: 2017-07-03Bibliographically approved

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MEMS 2017_Xiaojing Wang(1031 kB)34 downloads
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CiteExportLink to record
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