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Maskless Manufacturing of Through Glass Vias (TGVs) and Their Test Structures
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0003-1112-3308
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. Silex Microsystems AB, Järfälla, SWEDEN.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. Karlsruhe Institute of Technology (KIT), Germany.ORCID iD: 0000-0003-3452-6361
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9552-4234
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2017 (English)In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2017, p. 753-756, article id 7863517Conference paper, Published paper (Refereed)
Abstract [en]

Through glass vias (TGVs) are a key component in glass-based interposers and microelectromechanical-system lid wafers. Magnetic-field-assisted self-assembly has been demonstrated earlier in fabrication of through silicon vias. Here we present an entirely maskless TGV fabrication process utilizing magnetic assembly. Femtosecond laser is used for ablative direct patterning of surface metal layers and for exposing the TGV conductors after wafer thinning. The proposed TGV structure is shown to be electrically functional by measuring the TGV resistance values.

Place, publisher, year, edition, pages
2017. p. 753-756, article id 7863517
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electrical Engineering
Identifiers
URN: urn:nbn:se:kth:diva-199833DOI: 10.1109/MEMSYS.2017.7863517ISI: 000402552000194Scopus ID: 2-s2.0-85015724335ISBN: 9781509050789 (print)OAI: oai:DiVA.org:kth-199833DiVA, id: diva2:1065481
Conference
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, USA, 22-26 January 2017
Funder
Knut and Alice Wallenberg Foundation, 'Working on Venus projecEU, European Research Council, 277879Swedish Foundation for Strategic Research , GMT14-0071VINNOVA, 324189
Available from: 2017-01-16 Created: 2017-01-16 Last updated: 2018-04-05Bibliographically approved

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