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Simulation of the Thermal Phenomena in a Hot Filament CVD Reactor
2013 (English)Independent thesis Advanced level (professional degree), 20 credits / 30 HE creditsStudent thesis
Abstract [en]

This study concerns the simulation of the thermal phenomenon inside a Hot Filament CVD reactor. It means that the point of interest of this study is to know how the heat propagates from the sources to the substrate and to the rest of the reactor.

Place, publisher, year, edition, pages
2013. , p. 73
Keyword [en]
Technology
Keyword [sv]
Teknik
Identifiers
URN: urn:nbn:se:ltu:diva-55181Local ID: c119d2ed-1e93-422e-9496-aae1a2458d14OAI: oai:DiVA.org:ltu-55181DiVA, id: diva2:1028562
Subject / course
Student thesis, at least 30 credits
Educational program
Materials Engineering, master's level
Supervisors
Note
Validerat; 20131025 (global_studentproject_submitter)Available from: 2016-10-04 Created: 2016-10-04Bibliographically approved

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fulltext(1849 kB)165 downloads
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File name FULLTEXT02.pdfFile size 1849 kBChecksum SHA-512
747dd61a79c781cdb907d1e4a0bdeaa0320c7c016eae95fbf4ab3fe6f73fdf4dcce53776be0cf4798a9074551e6ed953303e991f44793621f62442b79ad52c2f
Type fulltextMimetype application/pdf

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CiteExportLink to record
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  • apa
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