Simulation of the Thermal Phenomena in a Hot Filament CVD Reactor
Independent thesis Advanced level (professional degree), 20 credits / 30 HE creditsStudent thesis
This study concerns the simulation of the thermal phenomenon inside a Hot Filament CVD reactor. It means that the point of interest of this study is to know how the heat propagates from the sources to the substrate and to the rest of the reactor.
Place, publisher, year, edition, pages
2013. , 73 p.
IdentifiersURN: urn:nbn:se:ltu:diva-55181Local ID: c119d2ed-1e93-422e-9496-aae1a2458d14OAI: oai:DiVA.org:ltu-55181DiVA: diva2:1028562
Subject / course
Student thesis, at least 30 credits
Materials Engineering, master's level
Validerat; 20131025 (global_studentproject_submitter)2016-10-042016-10-04Bibliographically approved