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Interface controlled microstructure evolution in nanolayered thin films
TU Wien, Austria.
University of Leoben, Austria.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0001-9140-6724
TU Wien, Austria.
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2016 (English)In: Scripta Materialia, ISSN 1359-6462, E-ISSN 1872-8456, Vol. 123, 13-16 p.Article in journal (Refereed) Published
Abstract [en]

X-ray nano-diffraction and transmission electron microscopy were conducted along the thickness of a similar to 4 pm thick CrN/AlN multilayer with continuously increasing AlN layer thicknesses from similar to 1 to 15 nm on similar to 7 nm thick CrN template layers. The experiments reveal coherent growth, large columnar grains extending over several (bi-)layers for thin AlN layer thicknesses below similar to 4 nm. Above similar to 4 nm, the nucleation of the thermodynamically stable wurtzite structured AlN is favored, leading to coherency breakdown and reduction of the overall strains, disrupting the columnar microstructure and limiting the maximum grain size in film growth direction to the layer thickness. (C) 2016 Acta Materialia Inc. Published by Elsevier Ltd.

Place, publisher, year, edition, pages
PERGAMON-ELSEVIER SCIENCE LTD , 2016. Vol. 123, 13-16 p.
Keyword [en]
Coherent; Incoherent; Interfaces; Microstructure; Multilayer
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:liu:diva-131660DOI: 10.1016/j.scriptamat.2016.05.031ISI: 000381538300004OAI: oai:DiVA.org:liu-131660DiVA: diva2:1014966
Note

Funding Agencies|START Program of the Austrian Science Fund (FWF) [Y371]; Swedish Research Council [621-2012-4359, 622-2008-405]

Available from: 2016-10-03 Created: 2016-09-30 Last updated: 2016-11-02

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Persson, Per O A
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