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The influence of pressure and gas flow on size and morphology of titanium oxide nanoparticles synthesized by hollow cathode sputtering
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0003-3767-225X
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-6602-7981
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, Faculty of Science & Engineering. KTH Royal Institute Technology, Sweden.
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2016 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 120, no 4, 044308- p.Article in journal (Refereed) Published
Abstract [en]

Titanium oxide nanoparticles have been synthesized via sputtering of a hollow cathode in an argon atmosphere. The influence of pressure and gas flow has been studied. Changing the pressure affects the nanoparticle size, increasing approximately proportional to the pressure squared. The influence of gas flow is dependent on the pressure. In the low pressure regime (107 amp;lt;= p amp;lt;= 143 Pa), the nanoparticle size decreases with increasing gas flow; however, at high pressure (p = 215 Pa), the trend is reversed. For low pressures and high gas flows, it was necessary to add oxygen for the particles to nucleate. There is also a morphological transition of the nanoparticle shape that is dependent on the pressure. Shapes such as faceted, cubic, and cauliflower can be obtained. Published by AIP Publishing.

Place, publisher, year, edition, pages
AMER INST PHYSICS , 2016. Vol. 120, no 4, 044308- p.
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Fluid Mechanics and Acoustics
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URN: urn:nbn:se:liu:diva-131710DOI: 10.1063/1.4959993ISI: 000382405400029OAI: oai:DiVA.org:liu-131710DiVA: diva2:1010244
Note

Funding Agencies|Knut and Alice Wallenberg foundation [KAW 2014.0276]; Swedish Research Council via the Linkoping Linneaus Environment LiLi-NFM [2008-6572]

Available from: 2016-10-03 Created: 2016-09-30 Last updated: 2017-03-13

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Gunnarsson, RickardPilch, IrisBoyd, RobertBrenning, NilsHelmersson, Ulf
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