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Growth and characterisation of polymeric amorphous carbon and carbon nitride films from propane
Dipartimento di Fisica Sperimentale, Università di Torino.
Dipartimento di Fisica Sperimentale, Università di Torino.
Dipartimento di Fisica Sperimentale, Università di Torino.
Instituto de Ciencia de Materiales de Madrid, Consejo Superior de Investigaciones.
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2005 (English)In: Diamond and related materials, ISSN 0925-9635, E-ISSN 1879-0062, Vol. 14, no 3-7, p. 928-933Article in journal (Refereed) Published
Abstract [en]

In this work, we report about the deposition of a-C(N):H films by electron-cyclotron-resonance using propane as a carbon precursor. The films generally present high H contents (up to 61 at.%) and large optical gaps. The maximum N content we obtained is 13 at.%. In nitrogenated films, we observed a strong decrease of the stretching intensity of the infrared spectra of the hydrocarbon (CHn) vibrations, even at very low nitrogen content, the H content being still comparable to that of pure a-C:H. The various phenomena that can lead to such an effect are discussed: (i) different type of hydrogen bonding (CHn and NHn) in presence and in absence of nitrogenation; (ii) weakening of the cross-section of the CHn groups in presence of nitrogen; (iii) large presence of non-bonded hydrogen meaning, with this, either the presence of molecular H2 or unbounded hydrogen. In addition, the residual amount of IR absorption due to C-H vibrations shows that, in a-CN:H, C-H bonded and non-bonded hydrogen does coexist. © 2005 Elsevier B.V. All rights reserved.

Place, publisher, year, edition, pages
2005. Vol. 14, no 3-7, p. 928-933
Keywords [en]
Bonding configurations, Carbon nitride, Diamond-like carbon, Plasma CVD
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Experimental Physics
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URN: urn:nbn:se:ltu:diva-11067DOI: 10.1016/j.diamond.2005.01.030ISI: 000229751400131Scopus ID: 2-s2.0-18544371515Local ID: 9f94d5ed-a48d-41ab-ba77-bcb7d9031f72OAI: oai:DiVA.org:ltu-11067DiVA, id: diva2:984016
Note

Upprättat; 2005; 20141216 (albvom)

Available from: 2016-09-29 Created: 2016-09-29 Last updated: 2018-10-03Bibliographically approved

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