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Thickness uniformity and electron doping in epitaxial graphene on SiC
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tillämpad sensorvetenskap. Linköpings universitet, Tekniska högskolan.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tillämpad sensorvetenskap. Linköpings universitet, Tekniska högskolan.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Halvledarmaterial. Linköpings universitet, Tekniska högskolan.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tillämpad sensorvetenskap. Linköpings universitet, Tekniska högskolan.ORCID-id: 0000-0002-2817-3574
Vise andre og tillknytning
2013 (engelsk)Inngår i: Materials Science Forum, ISSN 0255-5476, E-ISSN 1662-9752, Vol. 740-742, s. 153-156Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

Large variations have been observed in the thickness uniformity and carrier concentration of epitaxial graphene grown on SiC by sublimation for samples grown under identical conditions and on nominally on-axis hexagonal SiC (0001) substrates. We have previously shown that these issues are both related to the morphology of the graphene-SiC surface after sublimation growth. Here we present a study on how the substrate polytype, substrate surface morphology and surface restructuring during sublimation growth affect the uniformity and carrier concentration in epitaxial graphene on SiC. These issues were investigated employing surface morphology mapping by atomic force microscopy coupled with local surface potential mapping using scanning Kelvin probe microscopy.

sted, utgiver, år, opplag, sider
Trans Tech Publications , 2013. Vol. 740-742, s. 153-156
Emneord [en]
epitaxial graphene on SiC; thickness uniformity; unintentional doping; scanning Kelvin probe microscopy
HSV kategori
Identifikatorer
URN: urn:nbn:se:liu:diva-96504DOI: 10.4028/www.scientific.net/MSF.740-742.153ISI: 000319785500037OAI: oai:DiVA.org:liu-96504DiVA, id: diva2:642805
Konferanse
9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012)
Tilgjengelig fra: 2013-08-23 Laget: 2013-08-20 Sist oppdatert: 2017-12-06

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Eriksson, JensPuglisi, DonatellaVasiliauskas, RemigijusLloyd Spetz, AnitaYakimova, Rositsa
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