Role of carbon in boron suboxide thin filmsShow others and affiliations
2003 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 21, no 4, p. 1355-1358Article in journal (Refereed) Published
Abstract [en]
X-ray amorphous BO0.02 thin films with the C content from 0 to 0.6 at. % were grown by reactive dual magnetron sputtering in an UHV system. It was shown that the elastic and dielectric properties of the as-deposited films are affected by the amount of the incorporated C and the film density.
Place, publisher, year, edition, pages
2003. Vol. 21, no 4, p. 1355-1358
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-46557DOI: 10.1116/1.1560715OAI: oai:DiVA.org:liu-46557DiVA, id: diva2:267453
2009-10-112009-10-112017-12-13