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Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligenta system, Micro and Nanosystems.ORCID iD: 0000-0002-8811-1615
Scania Technical Centre.
KTH, School of Electrical Engineering and Computer Science (EECS), Electrical Engineering, Electronics and Embedded systems, Integrated devices and circuits.ORCID iD: 0000-0003-4637-8001
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligenta system, Micro and Nanosystems.ORCID iD: 0000-0002-8853-0967
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2019 (English)In: Nano letters (Print), ISSN 1530-6984, E-ISSN 1530-6992, Vol. 19, no 10, p. 6788-6799Article in journal (Refereed) Published
Abstract [en]

Graphene is an atomically thin material that features unique electrical and mechanical properties, which makes it an extremely promising material for future nanoelectromechanical systems (NEMS). Recently, basic NEMS accelerometer functionality has been demonstrated by utilizing piezoresistive graphene ribbons with suspended silicon proof masses. However, the proposed graphene ribbons have limitations regarding mechanical robustness, manufacturing yield, and the maximum measurement current that can be applied across the ribbons. Here, we report on suspended graphene membranes that are fully clamped at their circumference and have attached silicon proof masses. We demonstrate their utility as piezoresistive NEMS accelerometers, and they are found to be more robust, have longer life span and higher manufacturing yield, can withstand higher measurement currents, and are able to suspend larger silicon proof masses, as compared to the previous graphene ribbon devices. These findings are an important step toward bringing ultraminiaturized piezoresistive graphene NEMS closer toward deployment in emerging applications such as in wearable electronics, biomedical implants, and internet of things (IoT) devices.

Place, publisher, year, edition, pages
American Chemical Society (ACS), 2019. Vol. 19, no 10, p. 6788-6799
National Category
Nano Technology
Identifiers
URN: urn:nbn:se:kth:diva-259524DOI: 10.1021/acs.nanolett.9b01759ISI: 000490353500011PubMedID: 31478660Scopus ID: 2-s2.0-85073124932OAI: oai:DiVA.org:kth-259524DiVA, id: diva2:1351806
Note

QC 20191011. QC 20191111

Available from: 2019-09-16 Created: 2019-09-16 Last updated: 2020-03-09Bibliographically approved

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