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New dynamic silicon photonic components enabled by MEMS technology
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0001-7249-7392
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
KTH.
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2018 (English)In: Proceedings Volume 10537, Silicon Photonics XIII, SPIE - International Society for Optical Engineering, 2018, Vol. 10537, article id 1053711Conference paper, Published paper (Refereed)
Abstract [en]

Silicon photonics is the study and application of integrated optical systems which use silicon as an optical medium, usually by confining light in optical waveguides etched into the surface of silicon-on-insulator (SOI) wafers. The term microelectromechanical systems (MEMS) refers to the technology of mechanics on the microscale actuated by electrostatic actuators. Due to the low power requirements of electrostatic actuation, MEMS components are very power efficient, making them well suited for dense integration and mobile operation. MEMS components are conventionally also implemented in silicon, and MEMS sensors such as accelerometers, gyros, and microphones are now standard in every smartphone. By combining these two successful technologies, new active photonic components with extremely low power consumption can be made. We discuss our recent experimental work on tunable filters, tunable fiber-to-chip couplers, and dynamic waveguide dispersion tuning, enabled by the marriage of silicon MEMS and silicon photonics.

Place, publisher, year, edition, pages
SPIE - International Society for Optical Engineering, 2018. Vol. 10537, article id 1053711
Series
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X ; 10537
Keywords [en]
MEMS, silicon photonics, tuning, ring resonator, waveguide dispersion, surface grating coupler
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electrical Engineering
Identifiers
URN: urn:nbn:se:kth:diva-225106DOI: 10.1117/12.2297588ISI: 000448020000015Scopus ID: 2-s2.0-85047395610ISBN: 9781510615595 (print)OAI: oai:DiVA.org:kth-225106DiVA, id: diva2:1194076
Conference
Silicon Photonics XIII 2018, San Francisco, United States, 29 January 2018 through 1 February 2018
Projects
VR-HETXMEMSM&M
Funder
Swedish Research Council, 621-2012-5364Swedish Research Council, B0460801EU, European Research Council, 277879EU, European Research Council, 267528
Note

QC 20180404

Available from: 2018-03-28 Created: 2018-03-28 Last updated: 2019-08-20Bibliographically approved

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Publisher's full textScopushttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10537/2297588/New-dynamic-silicon-photonic-components-enabled-by-MEMS-technology/10.1117/12.2297588.full

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Errando-Herranz, CarlosEdinger, PierreColangelo, MarcoBjörk, JoelAhmed, SamyStemme, GöranNiklaus, FrankGylfason, Kristinn B.
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