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Multi-component (Al,Cr,Nb,Y,Zr)N thin films by reactive magnetron sputter deposition for increased hardness and corrosion resistance
Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Kemiska sektionen, Institutionen för kemi - Ångström, Oorganisk kemi.ORCID-id: 0000-0001-7266-0022
Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Kemiska sektionen, Institutionen för kemi - Ångström, Oorganisk kemi.
Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Kemiska sektionen, Institutionen för kemi - Ångström, Oorganisk kemi.
Masaryk Univ, Dept Phys Elect, Brno, Czech Republic.ORCID-id: 0000-0001-8115-7576
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2020 (Engelska)Ingår i: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 693, artikel-id 137685Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

Multi-component nitride thin films in the Al-Cr-Nb-Y-Zr system with non-equimolar composition have been deposited by reactive dc magnetron sputtering. The substrate temperature and substrate bias have been varied, from room temperature to 700 degrees C and from 0 to -200 V respectively. The relationship between these varied growth conditions on the structure, morphology, mechanical and corrosion properties of the films have been probed. All films consisted of a single solid solution with a NaCl-type structure, as shown by X-ray diffraction. However, elemental energy dispersive spectroscopy maps, obtained in the scanning transmission electron microscope, indicated that there could be partial segregation of Al, Cr and Y atoms within the grains. The microstructure of the films became denser, more fine-grained and smoother as the bias and temperature were increased. Nanoindentation showed that the hardness of the films increased with both bias and temperature, reaching a maximum of 27 +/- 2 GPa. The corrosion resistance of the films, studied by performing potentiodynamic polarisation curves in 1 M HCl, was also found to be improved when compared to a commercially available hyper-duplex stainless steel and a ternary reference (Nb,Zr)N thin film as well.

Ort, förlag, år, upplaga, sidor
2020. Vol. 693, artikel-id 137685
Nationell ämneskategori
Oorganisk kemi
Identifikatorer
URN: urn:nbn:se:uu:diva-392700DOI: 10.1016/j.tsf.2019.137685ISI: 000501775900031OAI: oai:DiVA.org:uu-392700DiVA, id: diva2:1349294
Konferens
10th International Conference on Hot Wire (Cat) and Initiated Chemical Vapor Deposition (HWCVD), SEP 03-06, 2018, Kitakyushu, JAPAN
Forskningsfinansiär
Vetenskapsrådet, C0514401Stiftelsen för strategisk forskning (SSF), RIF14-0053Tillgänglig från: 2019-09-08 Skapad: 2019-09-08 Senast uppdaterad: 2020-03-05Bibliografiskt granskad
Ingår i avhandling
1. Reactive Sputtering of Complex Multi-component Nitride Thin Films
Öppna denna publikation i ny flik eller fönster >>Reactive Sputtering of Complex Multi-component Nitride Thin Films
2019 (Engelska)Doktorsavhandling, sammanläggning (Övrigt vetenskapligt)
Abstract [en]

The ever-increasing demand on improvement of protective nitride thin films has led to an expansion of the research field into multi-element based materials. The work in this thesis has focused on exploring new complex, multi-component nitride thin films based on three different material systems: Al-Ge-N, Hf-Nb-Ti-V-Zr-N and Al-Cr-Nb-Y-Zr-N. All films were synthesised by reactive dc magnetron sputtering and characterised with regard to structure and material properties, in particular the mechanical, optical and corrosion properties.

The Al-Ge-O-N coatings exhibited amorphisation of the structure upon oxygen addition, via the formation of a crystalline (Al1-xGex)(N1-yOy) solid solution phase for low O contents. The mechanical properties were improved, and hardness values up to 29 GPa were achieved for low O and Ge concentrations, most likely due to nanocomposite hardening. The optical absorption edge was tuneable towards shorter and longer wavelengths with increasing the O and Ge content respectively. Annealing to 850°C showed indications of increased thermal stability for the quaternary Al-Ge-O-N films compared to the ternary Al-Ge-N films.

Coatings in the Hf-Nb-Ti-V-Zr-N system were found to be highly crystalline featuring a single solid solution phase with NaCl-type structure for low Hf content, whereas an additional, tetragonally distorted, phase appeared for higher Hf contents. The mechanical properties, such as hardness and Young’s modulus increased with increasing Hf content, although the values were relatively low compared to those for transition metal nitrides in general.

The Al-Cr-Nb-Y-Zr-N films also crystallised in the NaCl-type structure for the films with high nitrogen contents, i.e. between 46 and 51 at.%. However, partial elemental segregation was present, mainly for yttrium, both within the grains and in the column boundaries. XPS results suggested that yttrium was in a metallic state, while the remaining elements were present in a nitrided environment. The partial segregation could possibly explain the observed ductile behaviour of the nitride films. Electrochemical tests showed that the corrosion resistance increased with increased nitrogen content and the films performed in some cases better than a hyper-duplex stainless steel.

This thesis demonstrates that solid solutions are formed for three relatively different nitride material systems when varying the composition. The solubilities of the solid solution phases were found to be limited as shown by amorphisation, partial elemental segregation or formation of a two-phase material. The limited solubility and the phase changes can be used to design the material properties.

Ort, förlag, år, upplaga, sidor
Uppsala: Acta Universitatis Upsaliensis, 2019. s. 71
Serie
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 1852
Nationell ämneskategori
Oorganisk kemi
Identifikatorer
urn:nbn:se:uu:diva-392704 (URN)978-91-513-0744-2 (ISBN)
Disputation
2019-10-25, Polhemssalen, Ångströmslaboratoriet, Lägerhyddsvägen 1, Uppsala, 09:15 (Engelska)
Opponent
Handledare
Tillgänglig från: 2019-10-04 Skapad: 2019-09-08 Senast uppdaterad: 2020-03-27

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Av författaren/redaktören
von Fieant, KristinaPaschalidou, Eirini-MariaSrinath, AishwaryaSoucek, PavelRiekehr, LarsNyholm, LeifLewin, Erik
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Thin Solid Films
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